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Micro-mechanical
alignment structures
Micro-optics require nanometer scale alignment to achieve the ultimate in low-loss
optical interconnect performance. Conventional approaches such as precision die
bonders are simply unable to place objects with the required sub-micron accuracy
and the alignment degrees-of-freedom.
To address the need for precise alignment, Axsun turned to the bulk MEMS technology
of LIGA to create a family of micro-mechanical alignment structures. Fabricated
with lithographic precision, our alignment structures serve as intermediate carriers
for Optical Toolbox devices that require placement on the substrate, including:
- Active devices
- Mirrors
- Lenses
- Filters
- I/O fibers
But Axsun's high aspect ratio metal (HARM) LIGA manufacturing process can
do much more. Today, Axsun is building micro-mechanical precision parts, including
fuzing capabilities for the US Army's next generation armaments.
©
Axsun Technologies |
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Micromechanical alignment structures
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